DI water and N2 consumption
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DI water and N2 consumption

 
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Zhou
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Posted: Thu May 05, 2005 8:35 am    Post subject: DI water and N2 consumption Reply with quote
Dear All,

I want to calculate the consumption of the wet station and rinse-dryer.
Does anyone have the information about:

(1)How much water and N2 is needed for 4 cycles rinsing in one rinsing
tank (for 2" or 4" wafers rinsing)?

(2)How much water and N2 needed for general dry process for a 4"
rinse-dryer?

Best regards,

Egan

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